JPH0325073Y2 - - Google Patents
Info
- Publication number
- JPH0325073Y2 JPH0325073Y2 JP15745086U JP15745086U JPH0325073Y2 JP H0325073 Y2 JPH0325073 Y2 JP H0325073Y2 JP 15745086 U JP15745086 U JP 15745086U JP 15745086 U JP15745086 U JP 15745086U JP H0325073 Y2 JPH0325073 Y2 JP H0325073Y2
- Authority
- JP
- Japan
- Prior art keywords
- connector
- clean room
- pass box
- wall
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 28
- 230000008878 coupling Effects 0.000 description 12
- 238000010168 coupling process Methods 0.000 description 12
- 238000005859 coupling reaction Methods 0.000 description 12
- 230000003749 cleanliness Effects 0.000 description 8
- 238000003780 insertion Methods 0.000 description 8
- 230000037431 insertion Effects 0.000 description 8
- 239000000428 dust Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 210000004907 gland Anatomy 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 241000282994 Cervidae Species 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007634 remodeling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15745086U JPH0325073Y2 (en]) | 1986-10-14 | 1986-10-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15745086U JPH0325073Y2 (en]) | 1986-10-14 | 1986-10-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6363642U JPS6363642U (en]) | 1988-04-27 |
| JPH0325073Y2 true JPH0325073Y2 (en]) | 1991-05-31 |
Family
ID=31080008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15745086U Expired JPH0325073Y2 (en]) | 1986-10-14 | 1986-10-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325073Y2 (en]) |
-
1986
- 1986-10-14 JP JP15745086U patent/JPH0325073Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6363642U (en]) | 1988-04-27 |
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